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October 1986

Volume 39, Issue 10

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ARTICLES

Select this Article		Special Issue: The Science of VLSI John A. Armstrong


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Select this Article		Reactive‐Ion Etching Gottlieb S. Oehrlein


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	+ -	Show Topic Plasma‐based dry etching processes offer higher accuracy in replicating device patterns than wet etching patterns, but further advances may depend on a better understanding of gas‐phase phenomena and plasma‐surface interactions.

Select this Article		The Growth of Novel Silicon Materials John C. Bean


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	+ -	Show Topic Epitaxial growth of germanium‐silicon alloys or metal silicides on silicon produces structures that can be used in high‐performance optical and electronic devices.

Select this Article		VLSI Technology and Dielectric Film Science Frank J. Feigl


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	+ -	Show Topic The oxide of silicon is mechanically stable, electrically insulating and chemically protective; it forms an integral part of nearly every integrated circuit, but we still need to determine many details about its structure and properties.

Select this Article		Interconnections in VLSI Prabhakar B. Ghate


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	+ -	Show Topic Making reliable connections between a million or more electronic components on a single chip requires a multidisciplinary approach involving thin conducting and dielectric films, chemical reactions and diffusion at interfaces.

Select this Article		Compound‐Semiconductor Transistors Lester F. Eastman


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	+ -	Show Topic Faster electrons, direct bandgaps and smaller power dissipation translate into electronic devices with higher operating frequencies, compatibility with optics and a tolerance of closer packing.

LETTERS

Select this Article		Quasiperiodic Pulsars F. Curtis Michel


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Select this Article		Rename Livermore Mary B. Lawrence


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Select this Article		More on Maxwell Ivan Tolstoy and Daniel M. Siegel


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Select this Article		Physics‐Information Group? Alfred J. Hodina


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Select this Article		Aharanov‐Bohm Effect Francisco Izaguirre


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Select this Article		Physicists' Terminology David Mermin


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Select this Article		Polarized Scattering Thomas R. Love


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Select this Article		Capping Research Overhead Robert J. Yaes


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Select this Article		Physics Classroom Revisited Peter Froehle, Peter Lindenfeld, and George Pallrand


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Select this Article		Einstein and the Vatican P. A. A. Laura


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Select this Article		The Refereeing Process Alwyn Eades


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SEARCH AND DISCOVERY

Select this Article		Reanalysis of Old Eötvös Data Suggests 5th Force…To Some Bertram Schwarzschild


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MEETINGS

Select this Article		Joint Vacuum‐Science Meeting in Baltimore


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BOOKS

Select this Article		Bird of Passage: Recollections of a Physicist Rudolf Peierls and Hendrik B. G. Casimir, Reviewer


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Select this Article		Accretion Power in Astrophysics J. Frank, A. R. King, D. J. Raine, and Jacob Shaham, Reviewer


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Select this Article		Statistical Optics Joseph W. Goodman and Lorenzo M. Narducci, Reviewer


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Select this Article		New Books


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NEW PRODUCTS

Select this Article		New Products


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WE HEAR THAT

Select this Article		Five Physicists Receive Lawrence Awards


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Select this Article		ACA Fankuchen Award to Rossmann


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Select this Article		In Brief


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OBITUARIES

Select this Article FREE		James Rainwater W. W. Havens, Jr.


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WASHINGTON REPORTS

Select this Article		Japan and US Sign Truce in Microchip War; Victor in Doubt Irwin Goodwin


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Select this Article		Bardon's Reputation in NSF Physics Precedes Him to NATO Irwin Goodwin


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PHYSICS COMMUNITY

Select this Article		Breeders and Reprocessing are Challenged in Germany, UK William Sweet


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Select this Article		AURA Gets New Leadership


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Select this Article		ACA Elects Bugg Vice‐President


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Select this Article		New German Research Reactor Proposed William Sweet


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Select this Article		New AIP Translation Journal on Chinese Lasers Appears


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Select this Article		Anderson is President‐Elect of AGU


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Select this Article		Prewitt Heads Geophysical Laboratory


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Select this Article		In Brief


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NEWS FROM APS

Select this Article		POPA Forms Committee to Assess Physics‐Workforce Issue


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Select this Article		Newsletter in Applied Physics is Launched


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EDITORIAL

Select this Article		SSC—Costs and Consequences Robert K. Adair


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October 1986

Volume 39, Issue 10

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